Laser annealing processes are now used in many applications in most advanced microelectronics technologies. Whether in the context of nanotechnologies (nanometric CMOS components) or in that of 3D integration technologies, the specific characteristics of laser annealing make it possible to reach very high temperatures in very short times, very locally, and to work in conditions out of thermodynamic equilibrium. This has many advantages in terms of thermal budget, but also physical effects on atoms (thermomechanical, diffusion of atoms and electrical activation of dopants).

LETI has been developing and studying nanosecond laser annealing (NLA) processes for micro and nanotechnologies for several years. The simulation of local physical effects is one of the pillars of its development. Today, simulations are carried out using dedicated software provided by the manufacturer of the laser annealing equipment. The latter makes it possible to take into account the penetration of laser radiation into the material as well as the effects of thermal conduction in it. Phase change phenomena are also taken into account (liquid and solid phase above the melting temperature).

During this internship, we propose to go further in the simulation of laser annealing by using other tools than those currently in place. The use of other tools than that provided by the equipment manufacturer will make it possible to take into account the effects of temperature at the level of atomic physics, atomic diffusion and dopant activation. Part of the internship will be devoted to getting to grips with each tool, then to comparing the results given by each of them in terms of temperature mapping and thickness of molten material. Finally, a calibration of the material data (thermal conduction in particular) will be necessary based on experimental data. This internship will benefit from close collaboration between the simulation, clean room process development and physical characterization teams.

You are preparing a Engineer level diploma in the field of micro and nano technologies.

You have a strong interest in scientific and technological research. You already have knowledge of technological processes for manufacturing components at the nanometric scale. You enjoy teamwork and have good communication skills for scientific results.